ASML-imec Partnership Highlights eBeam Inspection Demand as 3D Device Market Targets USD 1.42 Billion
ASML and imec announced a strategic partnership on March 11, 2025, covering 0.55 NA EUV, 0.33 NA EUV, YieldStar optical metrology, and HMI single- and multi-beam technologies. The development highlights how electron-beam inspection is becoming part of the broader process-control toolkit as semiconductor manufacturers move toward increasingly complex three-dimensional device structures.The 3D...
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